Ellipsometry
SENTECH SENpro
Spectroscopic ellipsometry is a non-contact and non-destructive method for characterizing thin films and surfaces.
This technique allows for the precise determination of film thicknesses, refractive indices, dielectric material properties, and extinction coefficients.
The measurement principle is based on comparing the measured change in the polarization state of light reflected from the surface of a sample with a theoretical model.
By evaluating the ellipsometric parameters Ψ and Δ, precise information about the optical and physical properties of the sample can be obtained.
Our SENpro™ measures Ψ and Δ in the VIS-NIR range and allows measurements on a wide variety of samples, including:
- Thin films (e.g., SiO2, Si3N4, graphene, etc.)
- Multilayer systems
- Semiconductors
- Metals
- Polymers (photoresist, etc.)
- ...
The motorized x-y stage allows for automated measurements on the same sample and mapping of measured values.
A liquid cell enables in-situ measurements.
The SpectraRay/4 evaluation software offers a large number of possible material models, from which a suitable model can be created for each sample.
Contact Person
Währinger Straße 38-42
1090
Wien
Room: 3327
Email
+43-1-4277-73813
Terms of use and usage fees
This device can be used autonomously after successful training.
To be authorised to use this device, you must pass the following tests:
- General Safety Guidelines for Faculty Members
- Laboratory Safety
- Laser Safety
| User group | Hourly rate |
|---|---|
| Faculties of Physics and Chemistry | - |
| Vienna Life Science Instruments | 2.5 € |
| University users | 5 € |
| Non-university users | 10 € |
We also charge for the costs of our staff for training sessions and measurements that cannot be carried out independently.
| User group | Hourly Rate for the Operator | Note |
|---|---|---|
| Faculties of Physics and Chemistry | - | |
| Vienna Life Science Instruments | 70 € | 1. |
| University users | 70 € | 1. |
| Non-university users | 100 € |
- Under a publication agreement, the hourly rate for our employees is also waived.
Specifications
| Device Parameter | Value or Range |
|---|---|
| Measurement Principle | Spectroscopic ellipsometry |
| Wavelength Range | 370nm to 1050 nm |
| Measurement Duration | < 10s |
| Measurement Point Size | 2mm |
| Lightsource | Halogen lamp |
| Sample Thickness | 1nm to 15µm |
| Goniometer | 40° to 85° in 5° increments |
| X-Y Mapping Distance | 50mm |
| Maximum Sample Height | 8mm |
| Maximum Sample Diameter | 6" Wafer / 150mm |
| Spectral Resolution | 2.4nm FWHM |
Downloads
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