Physical Vapour Deposition
Korvus HEX
Physical vapor deposition (PVD) is a vacuum-based process for coating solids. Up to three different coating sources can be mounted on the Korvus Hex vacuum chamber. Currently, two thermal vaporization sources, one electron beam vaporization source, and one sputtering source are available, which can be combined as needed. Both a DC power supply and a high-frequency power supply are available for the sputtering source.
For more information, please contact the manufacturer.
Responsible Technician
Boltzmanngasse 5
1090
Wien
Room: 3341A
Email
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+43-1-4277-73803
Terms of use and usage fees
This device can be used autonomously by members of the faculties of chemistry and physics after successful training. Use by external personnel is not permitted.
To be authorised to use this device, you must pass the following tests:
- General Safety Guidelines for Faculty Members
- Laboratory Safety
Please report any problems with the device to the responsible technician.
| User group | Usage fees |
|---|---|
| Faculties of Physics and Chemistry | None, Consumables must be provided by the users themselves. |
| Vienna Life Science Instruments | Usage not possible |
| University users | Usage not possible |
| Non-university users | Usage not possible |
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